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MAV Design Aspects Using MEMS

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Fig. 11.1 a MEMS components and b MST and its classification

Table 11.1 Applications of MEMS based on energy domains

Mechanical

Force, pressure, velocity, acceleration, position

Thermal

Temperature, entropy, heat, heat flow

Chemical

Concentration, composition, reaction rate

Radient

Electromagnetic wave intensity, phase, wavelength, polarization reflectance,

refractive index

Magnetic

Field intensity, flux density, magnetic moment, permeability

Electrical

Voltage, current, charge, resistance, capacitance, polarization

Source Extracted from Prime Faraday Technology Watch [1]

Sensor: It is a measuring device, collects the information from surroundings and

provides an electrical output signal with respect to the measured parameter. Based

on the type of energy domain the MEMS applications are categorized.

Actuator: It is a converting device and converts electrical signal into an action.

It creates forces to manipulate itself or other mechanical devices or surrounding

environments to do some useful function (Table 11.1).

Role of MEMS in Various Applications

The wide ranges of MEMS found in different applications in multiple markets are

listed below (Table 11.2).